This low-temperature supercritical fluid treatment of β-Ga2O3 Schottky barrier diodes causes increased breakdown voltage, reduced interface state density, & superior high-temperature operational stability of treated devices. #Semiconductors doi.org/10.1116/6.00...

A new 3D thermal-electrical model for Czochralski silicon growth reveals limitations in the 2D models in simulating heat transfer & heat loss—allowing for more effective application of numerical simulation to promote high-quality & low-cost crystal growth. doi.org/10.1116/6.00...

This study from authors at Xiamen University investigated the optoelectronic & communication performance of micro-LEDs with varied thicknesses of Al2O3 or SiO2 passivation layers, offering insights for the fabrication of these high-performance devices. doi.org/10.1116/6.00...

Authors from AIST & Kyoto University developed a volcano-structured double-gate FEA, with the focus electrode set below the gate electrode, allowing for high-current operation & providing the sensitivity & tolerance needed for some semiconductor processes. doi.org/10.1116/6.00...

Boost your ALD films! Authors from @oregonstate.edu show how microwave-enhanced #ALDep cuts defects & improves film quality & electrical performance—during deposition, not after. doi.org/10.1116/6.00...

Researchers from @coschoolofmines.bsky.social & @lamresearch.com search show that O₂ dilution of C₄F₆/Ar plasma controls CFₓ buildup to control the etch rate, & propose a possible mechanism responsible for the temperature dependence for RIE of SiNx in C₄F₆/O₂/Ar plasmas. doi.org/10.1116/6.00...

Researchers from @univofmaryland.bsky.social & @uvmvermont.bsky.social report the first molecular layer deposition of a crown ether-containing polymer, establishing a new route for incorporating functional macrocycles into conformal, nanoscale coatings. 👑 doi.org/10.1116/6.00...

Researchers from Hokkaido University demonstrate how the alternative precursor AlMe₂(iPr-AMD) plus the use of self-assembled monolayers as surface passivation agents enables highly selective Al₂O₃ film growth with better stability & control than TMA. doi.org/10.1116/6.00...

This study presents a systematic investigation on anisotropy in rutile titanium dioxide, a typical photocatalyst, highlighting anisotropic charge carrier dynamics in electrocatalysts and exploring variations in hydrogen evolution reaction behavior. doi.org/10.1116/6.00...

Authors from Seoul National University & Samsung demonstrated a scalable & CMOS-compatible doping method for two-dimensional transition metal dichalcogenides involving phosphorus-ion implantation followed by rapid thermal annealing. doi.org/10.1116/6.00...

A new method of plasma-assisted activation enables strong, oxide-free Cu-Cu bonding below 300°C—improving hybrid bonding performance while reducing the impact of the mismatch in thermal expansion coefficients between the Cu & insulator. doi.org/10.1116/6.00...

Niobium nitride is important for superconducting electronics. Researchers from @caltech.edu and @ucberkeleyofficial.bsky.social developed an #ALEtch process with low damage and sub-nm etching precision, which may enhance quantum device performance. doi.org/10.1116/6.00...

Precise control of Bi incorporation in MBE-grown InSbBi films via flux and temperature tuning enables smooth, droplet-free surfaces ideal for quantum and IR device integration. Researchers from @utknoxville.bsky.social and ORNL describe their methodology. doi.org/10.1116/6.00...

Diamond is an ultrawide bandgap semiconductor with exceptional physical properties, making it suitable for various applications. Precise SIMS analysis improves impurity characterization, supporting diamond-based electronic & quantum applications. doi.org/10.1116/6.00...

Researchers from FAU Erlangen-Nürnberg investigate how intense laser pulses trigger multielectron emission from metal needle tips — revealing a nonlinear scaling behavior that challenges conventional theories. doi.org/10.1116/6.00...

Junctionless transistors (JLTs) show potential for the fabrication of more cost-effective & energy-efficient sensors. This study examines how channel geometry affects the functionality & performance of JLT-based sensors with 3D structures. doi.org/10.1116/6.00...

How strong are the electric fields needed for electron emission or field evaporation in single-walled carbon nanotubes (SWNTs)? Combining theory & experiment, authors from @cnrs.fr developed a clearer framework to understand & model field effects in SWNTs. doi.org/10.1116/6.00...

This study mapped the growth of graphene within an atmospheric pressure microwave plasma & researchers from UIUC investigated the effects of microwave forward power & methane flow rate on the quality of the resulting material. doi.org/10.1116/6.00...

Ferritic stainless steels AISI 441 & 444 show 1000x lower outgassing than AISI 304L—making them cost-effective, high-performance options to withstand the ultrahigh vacuum environments of future gravitational wave detectors. doi.org/10.1116/6.00...

As pattern sizes shrink to the nanoscale, understanding resist behavior at the molecular level becomes critical. This study used molecular dynamics simulations to visualize how a PGMA resist develops in electron beam lithography. doi.org/10.1116/6.00...

As chip designs move to 3D—like GAA transistors & 3D DRAM—etching deep, narrow features becomes increasingly complex. This study uses 3D Monte Carlo simulations to explore how mask shape, plasma chemistry, & bias pulsing impact silicon etch profiles. doi.org/10.1116/6.00...

Laser oscillation emerged from an organic crystal with a surface diffraction grating fabricated by focused ion beam and plasma etching, highlighting this method's promise for organic photonic devices. doi.org/10.1116/5.02...

Researchers from @cea.fr combine the complementary strengths of XPS & ToF-SIMS to analyze the chemistry & structure of HgCdTe oxides formed during infrared detector manufacturing, & assess the influence on device performance using photoluminescence decay measurements. doi.org/10.1116/6.00...

Researchers have demonstrated in situ carbon nanofiber growth at atmospheric pressure inside a TEM— bridging the gap between lab-scale and industrial carbon nanotube synthesis. doi.org/10.1116/6.00...

This new system enables in-situ, non-destructive testing of ultrathin superconducting films in ultra-high vacuum, preserving properties and measuring critical temperature down to 4 K. doi.org/10.1116/6.00...

Defects in ZnO microwires are shown to boost piezovoltage under strain. Researchers from Ohio State University show how tailoring defects can increase piezoelectric power for biomedical applications, nanogenerators, & MEMS. doi.org/10.1116/6.00...

Thanks to an innovative approach to film growth that provides a continuous gradient of composition, researchers from @univparissaclay.bsky.social, @cnrs.fr, and Suzhou Univ. systematically studied the SIMS matrix effect, showing the role of ionization energy in oxides. doi.org/10.1116/6.00...

To meet growing storage capacity demands, researchers from Kioxia propose the use of fluorocarbon gas as an etchant in 3D flash memory fabrication. The gas enables infinite selectivity between SiO2 & SiN films during the dry etching process. doi.org/10.1116/6.00...

Transparent ITO/Ag/ITO antennas show high conductivity and 76% light transmittance—ideal for next-gen wireless tech in wearables, phones, cars, and buildings. doi.org/10.1116/6.00...

A new AI model predicts 3D plasma etch profiles with high accuracy and cuts simulation time drastically—boosting chip design and process control. #semiconductors doi.org/10.1116/6.00...

Authors including @physics94.bsky.social developed an open-source Python based X-ray Emission Spectroscopy fitting software, known as XES Neo, using the artificial intelligence tool of a genetic algorithm, based on the Neo package. doi.org/10.1116/6.00...

Carbon materials exhibit favorable weight, strength, & temp stability for many applications, but in extreme temps are prone to oxidation & ablation. This study presents & analyzes an optimized SiC–Si–Hf(Ta)B2 coating that exhibits improved oxidation & ablation protection. doi.org/10.1116/6.00...

Featured on the latest #JVSTB cover, authors from @czechacademy.bsky.social & Brno University of Technology developed a custom-designed compact vacuum chamber for laser induced plasma etching. doi.org/10.1116/6.00...

Our latest cover features this article related to boron neutron capture therapy (BNCT), an innovative & promising cancer treatment for malignant tumors due to its high precision. 🎯 ☑️ Check it out! doi.org/10.1116/6.00...

Accurate detection of low levels of elements such as C & O by ion beam sputtering techniques is complicated as they are the primary constituents of residual gas molecules in ultrahigh vacuum systems. This study presents a method of detection of O by #XPS. doi.org/10.1116/6.00...

Authors from New Zealand used a low-cost sol-gel method to grow high-quality, transparent Sn-doped Ga₂O₃ films—key for high-efficiency power electronics & UV photodetectors—showing the ability to produce Schottky diodes on intentionally doped sol-gel Ga₂O₃. doi.org/10.1116/6.00...

#XPS is widely used to obtain information about composition & chemistry of surfaces & interfaces - it can also provide unique information about interfacial structure & properties important for modern technologies. doi.org/10.1116/6.00...

Can semiconductor photocathodes beat RF breakdown? New research from authors at Michigan State, Los Alamos National Lab, & Oak Ridge National Lab explores why Cs₂Te-coated copper may resist catastrophic failure under high RF fields. doi.org/10.1116/5.02... @avs-members.bsky.social

Authors from @ucf.bsky.social employ simultaneous in situ spectroscopic ellipsometry & quadrupole mass spectrometry to reveal new insights into ZnO thin film etching using acetylacetone + O₂ plasma. doi.org/10.1116/6.00... @avs-members.bsky.social

Covering nanoscience & technology of vacuum electron sources & their applications, #JVSTB publishes a collection on Vacuum Nanoelectronics each year. Read the recent collection FREE for a limited time & submit to this year's now! 📑 Read: tinyurl.com/2vm6xnec ✏️ Submit: tinyurl.com/yntp2p5h

β-gallium oxide is a promising material for next-gen power electronics. To enhance Ga2O3-based power devices, researchers from University of Florida, @uofalabama.bsky.social, and NRL explore the use of p-n heterojunctions with p-type oxide materials such as CrMnO4. doi.org/10.1116/6.00...

Keep submitting your abstracts to #AVS71 and join us in Charlotte, NC this September!

#JVSTB has published collections on Vacuum Nanoelectronics for many years - contribute to our new collection now! Covering topics on the science, technology, & applications of vacuum electron sources. Submit until October 15, 2025! tinyurl.com/yntp2p5h

From authors at @NIST & @BrookhavenLab, this new “plasma-XPS” technique facilitates the identification of reaction intermediates critical for understanding plasma-assisted surface processes relevant to semiconductor nanomanufacturing. @avs-members.bsky.social doi.org/10.1116/6.00...

Our new #JVSTB collection covers the latest advances in sensor technologies & medical devices that leverage vacuum, nanotechnology, & advanced fabrication techniques - submit to the collection on Smart Sensors & Devices for Healthcare by October 15, 2025! tinyurl.com/3czpycey

Congratulations, Christophe! This recent study from Christophe & his colleagues shows how an alternative P-precursor, TDMAP, is used to deposit metal phosphates. The authors characterize aluminum phosphate & report on its use as a battery coating material. doi.org/10.1116/6.00...

AVS has lots to offer the #semiconductor industry, including high-impact research related to the #CHIPSAct. Check our our recent collection in #JVSTB on related research - FREE for a limited time! @avs-members.bsky.social tinyurl.com/4kwnebmy

Cointegration of CMOS & FeFETs has gained attention for use in IoT devices, neuromorphics & more. Authors from @rittigers.bsky.social & @microntech.bsky.social describe a simple & cost-effective process of selective wet etching of HfO2 & HZO films to enable this integration. doi.org/10.1116/6.00...

#JVSTA is a leader in #ALDep & #ALEtch. Each year, we publish collections in conjunction with the annual ALD/ALE meeting & this year's collections are now open for submissions! @avs-members.bsky.social Submit by November 1, 2025. tinyurl.com/4swne95y

Tomorrow is the LAST DAY to register for our FREE webinar on Responding to Reviewer Comments taking place this Thursday, April 24, 2025! #AVSWebinar @avs-members.bsky.social conta.cc/4hFFBeK