loading . . . Fluorosilane-induced softening and collapse of micropillar arrays - IOPscience Fluorosilane-induced softening and collapse of micropillar arrays, Moreira Lana, Gabriela, Fehlberg, Maja, Herbeck-Engel, Petra, Heppe, Gisela, Schlüßler, Raimund, Jähnke, Torsten, Arzt, Eduard, Benne... https://doi.org/10.1088/1361-6439/ae1e87